収差補正走査透過型電子顕微鏡を用いたサブナノオーダー分析の現状

• 川崎 直彦

  (株)東レリサーチセンター形態科学研究部

書誌事項

タイトル別名

• Present Stage of Sub-nanometer Analysis by Aberration-corrected Scanning Transmission Electron Microscopy
• シュウサ ホセイ ソウサ トウカガタ デンシ ケンビキョウ オ モチイタ サブナノオーダー ブンセキ ノ ゲンジョウ

抄録

  Scanning transmission electron microscopy (STEM) is a powerful tool for not only imaging but also elemental composition and chemical bonding analysis by energy dispersive X-ray spectroscopy (EDX) and electron energy-loss spectroscopy (EELS) with nanometer spatial resolutions. The technique of spherical aberration correction has recently been developed, and angstrom spatial resolutions have been achieved for EDX and EELS measurement as well as imaging.<br>   I also introduce other recent trends in STEM related techniques. Low acceleration voltage has often been adopted in order to reduce electron radiation damage. Recent monochrometer has achieved 0.2 eV energy resolution for EELS measurement, which enables us to analyze chemical bonding in more detail. A new type of silicon drift detector (SDD) improves the sensitivity of EDX 10 times higher than conventional detectors. These recent technologies are not independently implemented but combined in an ultimate system which can promote diverse applications of STEM.<br>

収録刊行物

• Ｊｏｕｒｎａｌ　ｏｆ　ｔｈｅ　Ｖａｃｕｕｍ　Ｓｏｃｉｅｔｙ　ｏｆ　Ｊａｐａｎ

  Ｊｏｕｒｎａｌ　ｏｆ　ｔｈｅ　Ｖａｃｕｕｍ　Ｓｏｃｉｅｔｙ　ｏｆ　Ｊａｐａｎ 56 (9), 360-364, 2013

  一般社団法人 日本真空学会

キーワード

• Spectroscopy
• Surfaces and Interfaces
• Instrumentation
• General Materials Science

詳細情報

• CRID: 1390001205295097600
• NII論文ID: 10031195259
• NII書誌ID: AA12298652
• DOI: 10.3131/jvsj2.56.360
• BIBCODE: 2013JVSJ...56..360K
• COI: 1:CAS:528:DC%2BC3sXhsl2it7fK
• ISSN: 18824749
• ISSN: 18822398
• NDL書誌ID: 024879141
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I024879141
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可