6.χnm領域における希土類プラズマ極端紫外光源  [in Japanese] Rare-earth Plasma Beyond Extreme Ultraviolet (BEUV) Sources at 6.χnm  [in Japanese]

Access this Article

Search this Article

Author(s)

Abstract

We have studied self-absorption effects of a laser-produced plasma (LPP) source at 6.<i>x</i>nm as a function of laser pulse duration and viewing angle. The spectral profiles are shown to have a strong dependence on viewing angle. Absorption effects are less pronounced when a 150-ps pulse duration is used due to reduced opacity resulting from plasma expansion. Conversion efficiencies and ion energies are also measured as a function of laser pulse duration and laser power density. A maximum conversion efficiency of 0.4% within a 0.6% bandwidth was measured, and lower ion kinetic energy was observed. It is concluded that in order to reduce self-absorption effects and ion yields, and increase conversion efficiencies, a short pulse duration should be used.

Journal

  • IEEJ Transactions on Fundamentals and Materials

    IEEJ Transactions on Fundamentals and Materials 133(10), 526-531, 2013-10-01

    The Institute of Electrical Engineers of Japan

References:  30

Codes

  • NII Article ID (NAID)
    10031200959
  • NII NACSIS-CAT ID (NCID)
    AN10136312
  • Text Lang
    JPN
  • Article Type
    ART
  • ISSN
    03854205
  • NDL Article ID
    024946457
  • NDL Call No.
    Z16-793
  • Data Source
    CJP  NDL  J-STAGE 
Page Top