位相制御多電極型交流放電プラズマ発生装置 : 低コスト大容量放電発生用電源 Phase-Arrayed AC Power Sources for Plasma Production with Multiple Electrodes
A new method to produce a large-scale dc-like plasma by using phase-arrayed ac power sources which are supplied to multiple electrodes has been proposed. Fundamental characteristics of the proposed method are described in detail about electrical structures of ac power sources and geometrical formations of multiple electrodes, comparing with conventional methods employed to generate plasmas. It is possible to produce a plasma with a low temporal-fluctuation and with a desirable spatial-profile in accordance with the requests of a practical application by properly arranging phases of the ac sources and positions of the electrodes.
富山県立大学紀要 6, 55-68, 1996-03-29