無電極高周波放電一様プラズマ球光源のインピーダンス

• 川口 元一

  三重大学

• 東方 眞

  松下電工株式会社

書誌事項

タイトル別名

• Impedance of Electrodeless RF Spherical Light Source with Plasma Uniformity
• ムデンキョク コウシュウハ ホウデン イチヨウ プラズマキュウ コウゲン ノ インピーダンス

抄録

One method for determining the impedance of an inductively coupled low-pressure argon plasma tube is described. Designed for application to inductively coupled fluorescent light sources, it was a spherical discharge tube and an induction coil wound on its equatorial surface. The pressure of the argon gas is around 100 Pa, and the frequency of the rf coil current is around 10 MHz. By assuming uniformity of the plasma density and electron temperature, an analytic solution for the electromagnetic field is easily obtained. Using this solution, we can obtain a convenient approximate calculation of the spatial distribution of the electric current and plasma impedance. The results of numerical calculation of impedance are given and compared with experimental results.

収録刊行物

• 照明学会誌

  照明学会誌 85 (2), 113-119, 2001

  一般社団法人 照明学会

キーワード

• inductively coupled discharge
• low-pressure argon light source
• calculation of impedance

詳細情報

• CRID: 1390282679063413376
• NII論文ID: 130006767092
• NII論文ID: 110001145010
• NII書誌ID: AN00268860
• DOI: 10.2150/jieij1980.85.2_113
• ISSN: 1349838X
• ISSN: 21851506
• ISSN: 00192341
• HANDLE: 10076/8727
• NDL書誌ID: 5652023
• Web Site: https://mie-u.repo.nii.ac.jp/records/7117
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I5652023
• Web Site: https://www.jstage.jst.go.jp/article/jieij1980/85/2/85_2_113/_pdf
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