三次元自由曲面の非接触形状測定センサの開発研究(第3報)

• 三好 隆志

  正会員 大阪大学工学部

• 高谷 裕浩

  正会員 大阪大学工学部

• 滝澤 暢

  学生会員 大阪大学大学院

• 福沢 亮太

  (株)島津製作所

書誌事項

タイトル別名

• Development of Non-contact Profile Sensor for 3-D Free-form Surfaces (3rd Report)
• 3次元自由曲面の非接触形状測定センサの開発研究-3-光リング式3-D形状計測センサ
• 3ジゲン ジユウ キョクメン ノ ヒ セッショク ケイジョウ ソクテイ センサ
• Optical Ring Image 3-D Profile Sensor
• 光リング式3-D形状計測センサ

抄録

This paper describes development of a new non-contact 3-D profile sensor which is not influenced very much by inclination angles and edge profiles of 3-D free form surfaces. The proposed 3-D profile sensor called “optical ring image sensor” has two major advantages. First, reflection light from a target surface in optical axis can be detected in all directions using a ring slit. Second, the radius of optical ring image is linearly proportional to the displacement of the surface in optical axis. In this paper, a prototype of optical ring image 3-D profile sensor with unique properties mentioned above is designed and produced. From onmachine measurement using NC machine tool as well as fundamental experiments, this sensor makes it possible to measure the displacement within an accuracy of about ±7μm for the steeply inclined diffuse reflection surface up to ±80° and also about ±10μm even for a nearly specular reflection surface inclined up to ±70°. Therefore, it will be a very useful sensor for 3-D profile measurements of delicated shaped surfaces.

収録刊行物

• 精密工学会誌

  精密工学会誌 61 (2), 258-262, 1995

  公益社団法人 精密工学会

キーワード

• optical sensor
• 3-D profile
• non-contact measurement
• free form surface
• on-machine measurement

詳細情報

• CRID: 1390282679742704896
• NII論文ID: 110001367520
• NII書誌ID: AN1003250X
• DOI: 10.2493/jjspe.61.258
• ISSN: 1882675X
• ISSN: 09120289
• NDL書誌ID: 3593534
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I3593534
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