２次元ソフトウェアデータムによる超精密鏡面形状の絶対測定

• 葛 宗涛

  東北大学大学院 (現, 東北リコー (株))

• 高 偉

  東北大学工学研究科

• 竹内 一弘

  東北大学 (現, (株) 東芝機械)

• 清野 慧

  東北大学工学研究科

書誌事項

タイトル別名

• Absolute Measurement of an Ultra-precision Mirror with 2-D Software Datum.
• 2ジゲン ソフトウェア データ ム ニヨル チョウ セイミツキョウ メンケイジ

抄録

2-D software datum named as the 2-D mixed method has been constructed to measure mirror surface profiles. The probe of this method consists of two displacement and two angle sensors. Differential calculation of outputs of these four sensors eliminates pitch, roll and the z-directional translation errors of the scanning stages. An autonomous procedure to estimate and compensate the zero-adjustment error among these four sensors is also proposed. By using this software datum, 2-D profiles of ultra-precision surfaces can be measured absolutely without using any external reference. An experimental probe for realizing the 2-D mixed method has been developed and a mirror surface of 128 mm long and 64 mm wide was measured with the probe. Repeatability of measurements and reproducibility compared with the differential angle method have shown high reliability of the proposed method

収録刊行物

• 精密工学会誌

  精密工学会誌 63 (7), 967-971, 1997

  公益社団法人 精密工学会

キーワード

• metrology
• profile measurement
• software datum
• ultra-precision measurement
• scanning errors
• mixed method

詳細情報

• CRID: 1390282679740695680
• NII論文ID: 110001367865
• NII論文ID: 10003573814
• NII書誌ID: AN1003250X
• DOI: 10.2493/jjspe.63.967
• ISSN: 1882675X
• ISSN: 09120289
• NDL書誌ID: 4247779
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4247779
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可