角度センサの平均感度の迅速校正法に関する研究

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タイトル別名
  • Fast Calibration of Mean Sensitivity of Angle Sensor.
  • カクド センサ ノ ヘイキン カンド ノ ジンソク コウセイホウ ニ カンスル ケンキュウ

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抄録

The present study proposes a new method for calibrating the mean sensitivity of a precision angle sensor with a optional small measurement range without the need for an accurate reference instrument. This method can shorten a lot of time calibrated by the previously proposed method, and can calibrate the mean sensitivity of an angle sensor within an uncertainty limit, which is given by the, stability of the angle sensor in the measurement environment was estimated from thermal drift value. An angle sensor which has measurement range 500 microradian with nanoradian (nrad) resolution and stability of 3 nrad over 1 minute has been calibrated by the method. It was found that the repeatability errors of the calibrated mean sensitivity was approximately ±0.01%.

収録刊行物

  • 精密工学会誌

    精密工学会誌 65 (5), 725-729, 1999

    公益社団法人 精密工学会

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