球状単結晶シリコンの異方性エッチングによるマイクロ形状創成 [in Japanese] Micro Structure Fabrication in Ball Semiconductor by Anisotropic Etching [in Japanese]
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It is known that a high performance micro system for the medical treatment, biotechnology, and nanotechnology etc, become a system where the electric circuit and the sensor are integrated on flat surface and spherical surface etc. In the future, anisotropic etching for spherical single-crystal silicon can be a key technique in order to develop a higher performance micro system. This paper has investigated the result of microstructure fabrication in spherical single-crystal silicon by anisotropic etching, and proposed a selection indicator in the line direction of mask pattern (crystal orientation), which is corresponded to users.
- Journal of the Japan Society for Precision Engineering
Journal of the Japan Society for Precision Engineering 69(7), 960-964, 2003-07-05
The Japan Society for Precision Engineering