Ｆｒａｕｎｈｏｆｅｒ回折による超精密加工面粗さの測定評価に関する研究

• 高谷 裕浩

  学生会員 北海道大学工学部

• 三好 隆志

  正会員 北海道大学工学部

• 斎藤 勝隊

  正会員 北海道大学工学部

書誌事項

タイトル別名

• Measurement of ultra-fine random surface roughness based on fraunhofer diffraction.
• Fraunhofer カイセツ ニ ヨル チョウ セイミツ カコウメン アラサ

抄録

A new method based on the Fraunhofer diffraction theory which can estimate RMS roughness of super smooth random surface such as the polished or lapped surface is presented in this paper. The relations between the random surface roughness and the Fraunhofer diffraction pattern are analized theoretically and an equation which can estimate quantitatively the RMS roughness is derived. In order to verify the validity of this proposed method, computer simula-tions as well as experiments for the silicon wafer with a surface roughness of 1-10 nm R_rms are carried out. In addition, STM is used for checking the surface roughnesses of the workpieces. Consequently, it is found that this method makes it possible to measure the surface roughness within a 10% error from 1 nm to maximum 120 nm R_rms. Moreover, from experiments using an improved measuring system which can evaluate the texture all over the surface of a silicon wafer, this method is found to be useful for measuring quickly and easily the ultra fine surface roughness of the complete surface even if workpiece is set with a tilt and vibrates when the table is moving.

収録刊行物

• 精密工学会誌

  精密工学会誌 56 (2), 373-380, 1990

  公益社団法人 精密工学会

キーワード

• random surface
• ultra fine surface roughness
• Fraunhofer diffraction
• optical measurement

詳細情報

• CRID: 1390282679742744704
• NII論文ID: 110001370233
• NII論文ID: 10002972726
• NII書誌ID: AN1003250X
• DOI: 10.2493/jjspe.56.373
• ISSN: 1882675X
• ISSN: 09120289
• NDL書誌ID: 3651211
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I3651211
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可