能動制振機構を備えた除振台の開発  [in Japanese] Development of an Isolation Table with an Active Vibration Control Mechanism.  [in Japanese]

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Author(s)

Abstract

Isolation tables are effective in preventing vibration. If objects on a table move, however, the table starts vibrating at a low frequency, with a large displacement due to the force of the impact. Some equipment on an isolation table cannot be kept at a constant distance from equipment on the ground. To overcome this problem, An active vibration control mechanism based on state feedback control using 4 voice-coil motors was developed. This system could suppress the displacement of the isolation table at 100 μm even if some objects on the table moved.

Journal

  • Journal of the Japan Society for Precision Engineering

    Journal of the Japan Society for Precision Engineering 58(7), 1155-1160, 1992

    The Japan Society for Precision Engineering

Codes

  • NII Article ID (NAID)
    110001371089
  • NII NACSIS-CAT ID (NCID)
    AN1003250X
  • Text Lang
    JPN
  • ISSN
    0912-0289
  • NDL Article ID
    3778826
  • NDL Source Classification
    M079(振動工学・音響工学)
  • NDL Source Classification
    ZN12(科学技術--機械工学・工業--精密機械)
  • NDL Call No.
    Z16-466
  • Data Source
    NDL  NII-ELS  J-STAGE 
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