能動制振機構を備えた除振台の開発 Development of an Isolation Table with an Active Vibration Control Mechanism.

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抄録

Isolation tables are effective in preventing vibration. If objects on a table move, however, the table starts vibrating at a low frequency, with a large displacement due to the force of the impact. Some equipment on an isolation table cannot be kept at a constant distance from equipment on the ground. To overcome this problem, An active vibration control mechanism based on state feedback control using 4 voice-coil motors was developed. This system could suppress the displacement of the isolation table at 100 μm even if some objects on the table moved.

収録刊行物

  • 精密工学会誌

    精密工学会誌 58(7), 1155-1160, 1992

    公益社団法人精密工学会

各種コード

  • NII論文ID(NAID)
    110001371089
  • NII書誌ID(NCID)
    AN1003250X
  • 本文言語コード
    JPN
  • ISSN
    0912-0289
  • NDL 記事登録ID
    3778826
  • NDL 刊行物分類
    M079(振動工学・音響工学)
  • NDL 雑誌分類
    ZN12(科学技術--機械工学・工業--精密機械)
  • NDL 請求記号
    Z16-466
  • データ提供元
    NDL  NII-ELS  J-STAGE 
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