Development of an Isolation Table with an Active Vibration Control Mechanism.

DOI Web Site

Bibliographic Information

Other Title
  • 能動制振機構を備えた除振台の開発
  • ノウドウ セイシン キコウ オ ソナエタ ジョシンダイ ノ カイハツ

Search this article

Abstract

Isolation tables are effective in preventing vibration. If objects on a table move, however, the table starts vibrating at a low frequency, with a large displacement due to the force of the impact. Some equipment on an isolation table cannot be kept at a constant distance from equipment on the ground. To overcome this problem, An active vibration control mechanism based on state feedback control using 4 voice-coil motors was developed. This system could suppress the displacement of the isolation table at 100 μm even if some objects on the table moved.

Journal

Keywords

Details 詳細情報について

Report a problem

Back to top