能動制振機構を備えた除振台の開発 Development of an Isolation Table with an Active Vibration Control Mechanism.
Isolation tables are effective in preventing vibration. If objects on a table move, however, the table starts vibrating at a low frequency, with a large displacement due to the force of the impact. Some equipment on an isolation table cannot be kept at a constant distance from equipment on the ground. To overcome this problem, An active vibration control mechanism based on state feedback control using 4 voice-coil motors was developed. This system could suppress the displacement of the isolation table at 100 μm even if some objects on the table moved.
精密工学会誌 58(7), 1155-1160, 1992