４ビームによる直接的空間位置決め法

DOI Web Site 被引用文献2件

書誌事項

タイトル別名
  • Microscopic Coordinate Measurement by Four-beam Laser Interferometry.
  • 4 ビーム ニ ヨル チョクセツテキ クウカン イチギメホウ

この論文をさがす

抄録

A new method for measuring the three-dimensional coordinate of a microscopic scanning stage is proposed. Four laser interferometers linked with optical fibers are used to determine the position of the corner point of a corner mirror attached to the stage. The three-dimensional coordinate of the corner point is calculated by using only the length information given by the four laser interferometers. The method is traceable from the practical definition of length, and facilitates the optical alignment necessary to the interferometers. A commercial three-dimensional stage is calibrated by the proposed method with the coordinate accuracy of 20-30 nm.

収録刊行物

  • 精密工学会誌

    精密工学会誌 59 (6), 1019-1024, 1993

    公益社団法人 精密工学会

被引用文献 (2)*注記

もっと見る

キーワード

詳細情報 詳細情報について

問題の指摘

ページトップへ