書誌事項
- タイトル別名
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- Quantum Size Effects of a-Si(:H)/a-SiC(:H) Multilayer Films Prepared by rf Sputtering.
- スパッタホウ ニ ヨリ サクセイシタ a Si H a SiC H チョウコウ
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Quantum size effects of amorphous silicon/amorphous silicon carbide (a-Si(:H)/a-SiC(:H)) multilayer films prepared by a dual rf magnetron sputtering method are investigated by measurements of Vacuum Ultraviolet Photoelectron Spectroscopy (UPS) and optical absorption. Valence band offsets of a-Si/a-SiC and a-Si:H/a-SiC:H heterojunctions are 0.3 and 0.05 eV, respectively. Optical gaps of a-Si, a-SiC, a-Si:H and a-SiC:H are 1.22, 1.52, 1.87 and 2.20 eV, respectively. In a-Si:H/aSiC:H multilayer film the quantum well layer thickness dependence of the optical gap is found to be in good agreement with a 1-dimensional quantum well model. It is obtained that the effective mass of electron in a-Si:H film is 0.15 mo (mo; the mass of free electron). In a-Si/a-SiC multilayer film quantum size effect does not appear. It can be considered that the effective mass of hole in a-Si film is more than hundred times as large as that of free electron.
収録刊行物
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- 精密工学会誌
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精密工学会誌 60 (3), 393-396, 1994
公益社団法人 精密工学会
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詳細情報 詳細情報について
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- CRID
- 1390001204764838784
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- NII論文ID
- 110001371597
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- NII書誌ID
- AN1003250X
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- ISSN
- 1882675X
- 09120289
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- NDL書誌ID
- 3864142
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
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- 抄録ライセンスフラグ
- 使用不可