光造形法を応用したセラミック微小構造体の製法(第1報)

• 単 学伝

  正会員 オリソパス光学工業(株)

• 高木 太郎

  東京大学工学部

• 柳沢 一向

  オリンパス光学工業(株)

• 中島 尚正

  東京大学工学部

書誌事項

タイトル別名

• Development of a Manufacturing Process for Ceramic Microstructures by Using Micro Photoforming (1st Report)
• 光造形法を応用したセラミック微小構造体の製法-1-製法の提案と光造形実験
• ヒカリ ゾウケイホウ オ オウヨウシタ セラミック ビショウ コウゾウタイ ノ
• Principle of the Process and Photoforming Experiment
• 製法の提案と光造形実験

抄録

Micro photoforming is considered to be a useful and promising technique for manufacturing microstructures or micromechanisms. But the materials used in usual photoforming methods are restricted to UV photohardenable resins, and their properties are usually found unsatisfactory. In this paper, the authors proposed a new application of micro photoforming for manufacturing ceramic microstructures. According to the proposal, a liquid mixture, which is made by blending a photohardenable resin and ceramic powders, is used to photoform microstructures in the green state. The resin in the microstructures can be burnt out by so called deresining at appropriate temperature between 450°C and 600°C, and finally the ceramic microstructures can be obtained after sintering at higher temperature. In this paper, the authors also describe the instrumentation for micro photoforming, report some fundamental results that show the promising feasibility of micro photoforming for making three dimensional microstructures in the green state.

収録刊行物

• 精密工学会誌

  精密工学会誌 61 (3), 420-424, 1995

  公益社団法人 精密工学会

キーワード

• micro photoforming
• manufacturing process
• deresining
• sintering
• ceramic powders
• mixture of a resin and powders
• three dimensional microstructures

詳細情報

• CRID: 1390282679742337152
• NII論文ID: 110001371823
• NII書誌ID: AN1003250X
• DOI: 10.2493/jjspe.61.420
• ISSN: 1882675X
• ISSN: 09120289
• NDL書誌ID: 3600374
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I3600374
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