光散乱法によるナノメータオーダの粒径測定法の開発 (第4報)

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書誌事項

タイトル別名
  • Designing a New Apparatus for Measuring Particle Sizes of Nanometer Order by Light-scattering (4th Report)
  • 光散乱法によるナノメータオーダの粒径測定法の開発(第4報)光電子増倍管出力特性の定式化とダイナミックレンジの改善法
  • ヒカリ サンランホウ ニヨル ナノメータ オーダ ノ リュウケイ ソクテイホウ
  • Formulation for Output Characteristics of Photomultiplier and Improvement of Dynamic Range
  • 光電子増倍管出力特性の定式化とダイナミックレンジの改善法

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抄録

A new method has been developed to measure particle sizes of nanometer order on raw Si wafers by using a photomultiplier (PMT). The dynamic-range of a PMT used to detect extremely weak light is narrow generally. And moreover, as its rated current has a very low value, a protective circuit needs to guard the PMT against over-current due to unexpected very large particles. In this study, it was tried to derive theoretical formula for calculating the output current on the PMT quantitatively. By estimating the characteristics of the output current by the obtained formula, a method for protecting the PMT by using the saturation region at the characteristic of output current can be devised. As a result, it can be verified that this method could simplify the measuring method and the instruments, and it could magnify the dynamic range of the PMT in measuring extremely weak lights.

収録刊行物

  • 精密工学会誌

    精密工学会誌 62 (8), 1198-1202, 1996

    公益社団法人 精密工学会

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