板ガラスのレーザブレーキングに関する研究　２　　ＣＯ２レーザ光照射条件の検討

DOI Web Site 被引用文献2件 参考文献6件

書誌事項

タイトル別名
  • Study on Laser Breaking of Glass Plates. (2nd Report). The optimum CO2 laser beam irradiating condition.
  • イタガラス ノ レーザブレーキング ニ カンスル ケンキュウ ダイ2ホウ CO2 レーザコウ ショウシャ ジョウケン ノ ケントウ
  • The optimum CO<SUB>2</SUB> laser beam irradiating condition
  • CO<SUB>2</SUB>レーザ光照射条件の検討

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抄録

A method to break glass plate was proposed for substrates of display panel by CO2 laser beam heating. Generally, glass plate is broken by growing micro-crack which is generated during scribing from tip of a chisel under optimum load. And then, the generated micro-cracks are grown by mechanical force applied to the scribed trace. For laser breaking, the micro-crack is grown by tensile stress due to thermal expansion which arises from temperature rise by a CO2 laser beam irradiation onto the scribed trace instead of applying mechanical force. This paper deals with experimental results of the optimum laser irradiating condition and discussion of the laser breaking mechanisms. It was possible to break the glass plate finely and precisely without applying mechanical force at the same scribing velocity.

収録刊行物

  • 精密工学会誌

    精密工学会誌 66 (2), 213-217, 2000

    公益社団法人 精密工学会

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