マイクロ圧電アクチュエータ  [in Japanese] Micro Piezoelectric Actuator  [in Japanese]

Access this Article

Search this Article

Author(s)

Journal

  • Journal of the Japan Society for Precision Engineering

    Journal of the Japan Society for Precision Engineering 68(5), 645-648, 2002-05-05

    The Japan Society for Precision Engineering

References:  5

Cited by:  4

Codes

  • NII Article ID (NAID)
    110001373413
  • NII NACSIS-CAT ID (NCID)
    AN1003250X
  • Text Lang
    JPN
  • Article Type
    Journal Article
  • ISSN
    09120289
  • NDL Article ID
    6157121
  • NDL Source Classification
    ZN12(科学技術--機械工学・工業--精密機械)
  • NDL Call No.
    Z16-466
  • Data Source
    CJP  CJPref  NDL  NII-ELS  J-STAGE 
Page Top