水滴をレンズとして利用したレーザ加工

• 比田井 洋史

  東京工業大学大学院

• 戸倉 和

  東京工業大学大学院

書誌事項

タイトル別名

• Laser Processing with a Water Droplet as a Lens
• スイテキ オ レンズ ト シテ リヨウ シタ レーザ カコウ

抄録

Water droplets forms spherical surface due to the surface tension, and changing the size of droplets can vary the radius. In this paper, the availability of a droplet as a lens was investigated by applying for laser processing. Silica glass was used as a workpiece. Defocused ArF excimer laser beam was irradiated to the glass with/without droplets respectively.<BR>As a result, the laser beam could be focused by the droplets and caused cracks inside of the glass not at the surface. Changing the size of the droplets and the wettability of the glass enables to control focal length. Aspheric droplets formed by varying the wettability of the glass surface spatially, can control the laser beam intensity distribution. Many small droplets on the glass surface condensed by cooling enables to reduce the threshold of the laser fluence to process and enhance the processing speed.

収録刊行物

• 精密工学会誌

  精密工学会誌 69 (10), 1454-1458, 2003

  公益社団法人 精密工学会

キーワード

• excimer laser
• silica glass
• laser processing
• water droplet
• dynamic focusing lens
• condensation
• aspheric lens

詳細情報

• CRID: 1390001204798313344
• NII論文ID: 110001373504
• NII書誌ID: AN1003250X
• DOI: 10.2493/jjspe.69.1454
• ISSN: 1882675X
• ISSN: 09120289
• NDL書誌ID: 6723390
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I6723390
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN
• 抄録ライセンスフラグ: 使用不可