Laser Processing with a Water Droplet as a Lens
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- HIDAI Hirofumi
- 東京工業大学大学院
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- TOKURA Hitoshi
- 東京工業大学大学院
Bibliographic Information
- Other Title
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- 水滴をレンズとして利用したレーザ加工
- スイテキ オ レンズ ト シテ リヨウ シタ レーザ カコウ
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Abstract
Water droplets forms spherical surface due to the surface tension, and changing the size of droplets can vary the radius. In this paper, the availability of a droplet as a lens was investigated by applying for laser processing. Silica glass was used as a workpiece. Defocused ArF excimer laser beam was irradiated to the glass with/without droplets respectively.<BR>As a result, the laser beam could be focused by the droplets and caused cracks inside of the glass not at the surface. Changing the size of the droplets and the wettability of the glass enables to control focal length. Aspheric droplets formed by varying the wettability of the glass surface spatially, can control the laser beam intensity distribution. Many small droplets on the glass surface condensed by cooling enables to reduce the threshold of the laser fluence to process and enhance the processing speed.
Journal
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- Journal of the Japan Society for Precision Engineering
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Journal of the Japan Society for Precision Engineering 69 (10), 1454-1458, 2003
The Japan Society for Precision Engineering
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Keywords
Details 詳細情報について
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- CRID
- 1390001204798313344
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- NII Article ID
- 110001373504
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- NII Book ID
- AN1003250X
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- ISSN
- 1882675X
- 09120289
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- NDL BIB ID
- 6723390
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
- KAKEN
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- Abstract License Flag
- Disallowed