次世代CMP装置の開発 : 超低圧研磨, ローカル研磨技術の開発  [in Japanese] Development of Next-Generation CMP System : Technical Development of Ultra-Low Pressure Polishing and Local Polishing  [in Japanese]

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Author(s)

Journal

  • Journal of the Japan Society for Precision Engineering

    Journal of the Japan Society for Precision Engineering 70(6), 742-745, 2004-06-05

    The Japan Society for Precision Engineering

Cited by:  2

Codes

  • NII Article ID (NAID)
    110001373649
  • NII NACSIS-CAT ID (NCID)
    AN1003250X
  • Text Lang
    JPN
  • Article Type
    Journal Article
  • ISSN
    09120289
  • NDL Article ID
    6982311
  • NDL Source Classification
    ZN12(科学技術--機械工学・工業--精密機械)
  • NDL Call No.
    Z16-466
  • Data Source
    CJP  CJPref  NDL  NII-ELS  J-STAGE 
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