Ultra-Smoothness Grinding of Fine Ceramics by Coarse Grain Size Diamond Wheel
Bibliographic Information
- Other Title
-
- 粗粒ダイヤモンド砥石によるファインセラミックの超平滑研削
- 粗粒ダイヤモンド砥石によるファインセラミックの超平滑研削--研削油剤の効果(続報)
- ソリュウ ダイヤモンド トイシ ニ ヨル ファインセラミック ノ チョウヘイカツ ケンサク ケンサク ユザイ ノ コウカ ゾクホウ
- —Effect of Grinding Fluid (Continued Report)—
- —研削油剤の効果 (続報)—
Search this article
Abstract
In the report, the effect of grinding fluid on the newly devised ultra-smoothness grinding of silicon carbide and silicon nitride ceramics using the #140 diamond wheel is examined additionally following the previous report on the ultra-smoothness grinding of silicon carbide. The three types of grinding fluids are used for the examination. The main results obtained are as follows : (1) Grinding fluid supply is effective for the ultra-smoothness grinding of. silicon nitride ceramic as well as silicon carbide ceramic (2) The type and dilution of grinding fluid have the great influence on surface roughness in ultra-smoothness grinding of those ceramics. It is important to select the suitable grinding fluid for obtaining the ultra-smoothness surface. (3) Supplying the suitable grinding fluid, the surface smoothness of silicon nitride ceramic in measuring area of 256μm x 256μm attains below 60nm (Rz) or 3nm (Ra).
Journal
-
- Journal of the Japan Society for Precision Engineering, Contributed Papers
-
Journal of the Japan Society for Precision Engineering, Contributed Papers 70 (11), 1423-1427, 2004
The Japan Society for Precision Engineering
- Tweet
Keywords
Details 詳細情報について
-
- CRID
- 1390001205281314432
-
- NII Article ID
- 110001824078
-
- NII Book ID
- AA11966630
-
- ISSN
- 18818722
- 13488716
- 13488724
-
- NDL BIB ID
- 7144117
-
- Text Lang
- ja
-
- Data Source
-
- JaLC
- NDL
- Crossref
- CiNii Articles
- KAKEN
-
- Abstract License Flag
- Disallowed