Fracture Characteristics in Carbon Nitride Films Synthesized by Ion Beam Assist Deposition
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- SUZUKI Takamasa
- 名古屋大学大学院
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- MATSUBARA Yasutaka
- 名古屋大学大学院
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- YAMAMOTO Yu
- 名古屋大学大学院
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- MATSUMURO Akihito
- 名古屋大学大学院
Bibliographic Information
- Other Title
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- イオンビーム支援蒸着法で形成した窒化炭素薄膜の破壊特性
- イオンビーム シエン ジョウチャクホウ デ ケイセイ シタ チッカ タンソ ハクマク ノ ハカイ トクセイ
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Abstract
Carbon Nitride (C-N) films which were formed by ion-beam-assisted deposition has a good mechanical performance. The reason is that C-N films have sp2 and sp3 bonds and nanotube-like structure. C-N films have better wear property than general DLC films. In order to clarify the mechanical properties further, fracture characteristics and adhesion strength are examined. The fracture patterns were observed by in-situ surface observation system and fracture toughness was measured by nanoindentation in CN and CN/TiN films. The fracture pattern did not watch in CN and CN/TiN films. The value of fracture toughness in CN films is more than in DLC films. Scratch traces were observed by microscopy and AES. In C/TiN films peel occurred among C films and TiN buffer layer and substrate, but in CN/TiN films peel was only observed between TiN and the substrate. The results show, CN films have good fracture characteristics and strong bonding with the TiN films.
Journal
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- Journal of the Japan Society for Precision Engineering, Contributed Papers
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Journal of the Japan Society for Precision Engineering, Contributed Papers 71 (3), 352-357, 2005
The Japan Society for Precision Engineering
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Keywords
Details 詳細情報について
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- CRID
- 1390001205279937024
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- NII Article ID
- 110001824133
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- NII Book ID
- AA11966630
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- ISSN
- 18818722
- 13488716
- 13488724
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- NDL BIB ID
- 7288337
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
- KAKEN
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- Abstract License Flag
- Disallowed