Evaluation of Surface Roughness Parameters of Metal Films by Light Scattering Technique
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Light scattering is a powerful method to evaluate surface n'oughness parameters.From the information on radiation produced by the: surface roughness we are able toget a pair of roughness paramc:ter, i.e. the amplitude of surface corrugation and thetransverse correlation length. llowever, the parameters evaluated by such a way cannot explain the whole angular distribution of scattc:red light intensity. We show thatthe angular distribution of scattered light intensit3z can be properly explained by acombination of several paramc:ters.
- Journal of the Physical Society of Japan
Journal of the Physical Society of Japan 58(12), p4511-4516, 1989-12
The Physical Society of Japan (JPS)