Evaluation of Surface Roughness Parameters of Metal Films by Light Scattering Technique

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Author(s)

    • Naoi Yoshiki NAOI Y.
    • Department of Electrical and Electronic Engineering,Faculty of Engineering,The University of Tokushima
    • Fukui Masuo FUKUI Masuo
    • Department of Electrical and Electronic Engineering,Faculty of Engineering,The University of Tokushima

Abstract

Light scattering is a powerful method to evaluate surface n'oughness parameters.From the information on radiation produced by the: surface roughness we are able toget a pair of roughness paramc:ter, i.e. the amplitude of surface corrugation and thetransverse correlation length. llowever, the parameters evaluated by such a way cannot explain the whole angular distribution of scattc:red light intensity. We show thatthe angular distribution of scattered light intensit3z can be properly explained by acombination of several paramc:ters.

Journal

  • Journal of the Physical Society of Japan

    Journal of the Physical Society of Japan 58(12), p4511-4516, 1989-12

    The Physical Society of Japan (JPS)

Cited by:  5

Codes

  • NII Article ID (NAID)
    110001968775
  • NII NACSIS-CAT ID (NCID)
    AA00704814
  • Text Lang
    ENG
  • Article Type
    Journal Article
  • ISSN
    00319015
  • NDL Article ID
    3649099
  • NDL Source Classification
    MC61(分子・物性)
  • NDL Source Classification
    ZM35(科学技術--物理学)
  • NDL Call No.
    Z53-A404
  • Data Source
    CJPref  NDL  NII-ELS 
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