2p-A-11 Influences of Gas Flow Rate on Charcteristics of SF_6 13.56 MHz Discharge

• Ishikawa I

  Faculty of Eng. Yamanashi Univ.

• Nagaseki k

  Faculty of Eng. Yamanashi Univ.

• Kobayashi H

  Faculty of Eng. Yamanashi Univ.

• Nishimura E

  Tokyo Electron Yamanashi Ltd.

• Saito Y

  Faculty of Eng. Yamanashi Univ.

• Suganomata S

  Faculty of Eng. Yamanashi Univ.

Bibliographic Information

Other Title

• 2p-A-11 SF_6 13.56MHz 放電特性のガス流量依存

Journal

• Meeting Abstracts of the Physical Society of Japan

  Meeting Abstracts of the Physical Society of Japan 1994.4 (0), 119-, 1994

  The Physical Society of Japan

Details

• CRID: 1390282681141178880
• NII Article ID: 110001990818
• DOI: 10.11316/jpsgaiyoj.1994.4.0_119_1
• ISSN: 24331171
• Text Lang: ja
• Data Source:
  • JaLC
  • CiNii Articles