5a-K-11 Plasma Cathode Ion Source for Ion Assistited Deposition

• Shibuya T.

  Tokai Univ.

• Honda T.

  Tokai Univ.

• Harano Y.

  Tokai Univ.

• Hashimoto S.

  Tokai Univ.

• Yabe E.

  Tokai Univ.

• Takayama K.

  Tokai Univ.

Bibliographic Information

Other Title

• 5a-K-11 イオン・アシスト・デポジション用プラズマ陰極イオン源

Journal

• Meeting Abstracts of the Physical Society of Japan

  Meeting Abstracts of the Physical Society of Japan 1989.4 (0), 236-, 1989

  The Physical Society of Japan

Details

• CRID: 1390001206153343744
• NII Article ID: 110001992568
• DOI: 10.11316/jpsgaiyok.1989.4.0_236_1
• ISSN: 2433118X
• Text Lang: ja
• Data Source:
  • JaLC
  • CiNii Articles