Estimation of Uncertainty in Feature Based Metrology (3rd Report)

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  • 形体計測における不確かさの見積り (第3報)
  • ケイタイ ケイソク ニ オケル フ タシカ サ ノ ミツモリ ダイ3ポウ クブン タコウシキ ニ ヨル チョクセン ケイタイ ノ ケイジョウ ヘンサ モデル
  • —Form Deviation Model of Line Feature by Piecewise Polynomial—
  • ―区分多項式による直線形体の形状偏差モデル―

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Abstract

In coordinate metrology, it is the key technology to estimate the uncertainty of the measurement in a specific measuring strategy. In this paper, the influence of the systematic error in feature based metrology is theoretically analyzed to a line feature. When a line feature with a form deviation is measured with a coordinate measuring machine, the model which consists of a smooth curve of low frequency and a random error can describe the form deviation of the line feature. The technique of making the form deviation model of this line feature using a piecewise polynomial is proposed, and the method of calculating the parameters by least squares method is formulized. Furthermore, the evaluation indicator in the case of choosing a model and parameterization is shown. The reliability of the measured line feature is evaluated by applying error propagation to this method. Some simulations are statistically performed for this method and the concept of this paper and the usefulness of the fundamental data processing technique are confirmed.

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