書誌事項
- タイトル別名
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- Preparation of Ni-Zn Ferrite Thin Films by ICP Flash Evaporation Method
- ICP フラッシュ ジョウチャクホウ ニ ヨル Ni Zn フェライト ハクマ
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抄録
Ni-Zn ferrite thin films were prepared on fused silica plates by an inductively coupled plasma (ICP) flash evaporation method using ultrasonically atomized aqueous solutions of corresponding metal ions in the reduced Ar gas of 30kPa. All the films consisted same-size columnar particles and the particle size increased from 0.1 to 0.5μm in diameter with deposition time. The growth rate of the films was about 2.9μm/h. In this method, the metal composition agreed with that of the starting solution. Therefore, the ICP flash evaporation method using the mists of aqueous solutions was more advantageous to control the composition of complex metal oxide films than the method using the mixed oxide powders.
収録刊行物
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- Journal of the Ceramic Society of Japan (日本セラミックス協会学術論文誌)
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Journal of the Ceramic Society of Japan (日本セラミックス協会学術論文誌) 101 (1180), 1423-1426, 1993
公益社団法人 日本セラミックス協会
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詳細情報 詳細情報について
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- CRID
- 1390282680255010688
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- NII論文ID
- 110002288010
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- NII書誌ID
- AN10040326
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- ISSN
- 18821022
- 09145400
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- NDL書誌ID
- 3852084
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- データソース種別
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- JaLC
- NDL
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