酸化鉄薄膜の微細構造とNO<sub>2</sub>検知特性

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  • Microstructure and NO<sub>2</sub> Sensing Properties of Fe<sub>2</sub>O<sub>3</sub> Thin Films
  • サンカ テツ ハクマク ノ ビサイ コウゾウ ト NO2 ケンチ トクセイ

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W-doped Fe2O3 films have been fabricated on poly-crystalline allumina substrates by the RF magnetron sputtering method, and effects of annealing temperature on the NO2 sensing properties have been examined. The crystal structure of the obtained film changed from Fe3O4 to α-Fe2O3 after annealing at temperatures of 500 to 700°C in air. An increase in the annealing temperature increased the particle size, resulting in a decrease in the NO2-gas sensitivity. These results suggest that the NO2 sensitivity of W-doped Fe2O3 film depends on the particle size.

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