Time-Dependent Changes in Resistivity of SnO₂ Thin Films in Air with Water Vapor or Reducing Gas

• KANAMORI Masaaki

  First Research Dept., Research & Development Div., NOK Corporation

• SUZUKI Kiyohiro

  First Research Dept., Research & Development Div., NOK Corporation

• YAMADA Takeshi

  First Research Dept., Research & Development Div., NOK Corporation

• OHYA Yutaka

  Department of Chemistry, Faculty of Engineering, Gifu University

• TAKAHASHI Yasutaka

  Department of Chemistry, Faculty of Engineering, Gifu University

Bibliographic Information

Other Title

• 水蒸気及び還元性ガス雰囲気中における酸化スズ薄膜の抵抗率の経時変化
• スイジョウキ オヨビ カンゲンセイ ガス フンイキチュウ ニ オケル サンカ

Abstract

The long-term variations in the resistivity of SnO₂ films in air containing water vapor or reducing gas (denoted as wet air or test gas, respectively) were investigated quantitatively. Analyses of electronic properties, weight increase, film structure and chemical bonding condition of thin films showed that the resistivity increase in wet air and the decrease in the test gas were caused by a decrease and an increase in amount of oxygen vacancy in the lattice, respectively, accompanied with a change of carrier concentration.

Journal

• Journal of the Ceramic Society of Japan

  Journal of the Ceramic Society of Japan 103 (1204), 1258-1263, 1995

  The Ceramic Society of Japan

Keywords

• SnO₂
• Thin film
• Gas sensor
• Stability
• Resistivity

Details

• CRID: 1390282680253793664
• NII Article ID: 110002291290
• NII Book ID: AN10040326
• DOI: 10.2109/jcersj.103.1258
• ISSN: 18821022
• ISSN: 09145400
• NDL BIB ID: 3640396
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I3640396
• Web Site: http://www.jstage.jst.go.jp/article/jcersj1988/103/1204/103_1204_1258/_pdf
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed