ダイヤモンドライクカーボン薄膜のマイクロトライポロジ特性に及ぼす膜構造の影響

• 中 庸行

• 磯野 吉正

• 田中 武司

• 寺山 暢之

書誌事項

タイトル別名

• Microstructural Effect of Diamond-Like Carbon Thin Film on Micro-Tribological Propertis.
• ダイヤモンドライクカーボン ハクマク ノ マイクロトライボロジ トクセイ ニ オヨボス マク コウゾウ ノ エイキョウ

抄録

This paper describes the microstructural effect of Diamond-Like Carbon (DLC) thin film on micro-tribological properties. DLC thin films with density of 1.9-2.4 g/cm³ were deposited on Silicon (111) surface by Plasma-Enhanced CVD method of the hot cathode PIG discharge type. The effect of deposition conditions on the microstructure of DLC thin film was evaluated by Raman spectroscopy. Increasing the bias voltage and the discharge current shifted the peak of the G-band shift toward high frequency and enlarged I (D)/I (G) ratio. Pin-on-Plate friction experiments were carried out using a diamond pin in high vacuum. The friction coefficients of DLC thin films indicated constant values during the friction. The friction coefficients increased with shifting G-band toward low frequency in the range above 1540 cm^-1, but those did not vary with increasing I (D)/I (G). The friction coefficients were directly proportional to density of the film. Molecular orbital calculations revealed that the adhesion energy on the sp³ bonding atom cluster was higher than that on the sp² bonding atom cluster.

収録刊行物

• 日本機械学会論文集Ａ編

  日本機械学会論文集Ａ編 65 (634), 1427-1434, 1999

  一般社団法人 日本機械学会

キーワード

• Micro-Tribology
• Diamond-Like Carbon
• Plasma-Enhanced CVD
• Film Density
• Raman Spectroscopy
• Friction Coeffcient
• Wear
• Adhesion Energy

詳細情報

• CRID: 1390282679424152960
• NII論文ID: 110002375038
• NII書誌ID: AN0018742X
• DOI: 10.1299/kikaia.65.1427
• ISSN: 18848338
• ISSN: 03875008
• NDL書誌ID: 4776753
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4776753
• Web Site: http://www.jstage.jst.go.jp/article/kikaia1979/65/634/65_634_1427/_pdf
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可