炭素／窒化ホウ素固体潤滑超格子膜の形成とそのトライボロジー特性

• 関根 幸男

• 三宅 正二郎

• 渡部 修一

書誌事項

タイトル別名

• Deposition and Tribology of Carbon and Boron Nitride Superlattice Solid Lubricating Films.
• タンソ チッカ ホウソ コタイ ジュンカツ チョウコウシ マク ノ ケイセイ ト ソノ トライボロジー トクセイ

抄録

Carbon and boron nitride superlattice films were deposited by RF sputtering using two semicircular targets. Superlattice (C/BN)n films were deposited by controlling the opposing time of the substrate to each of the graphite and boron nitride semicircular targets. Micro-Vickers hardness, nanoindentation hardness and nanoscratching properties of these films were evaluated. Both micro-Vickers and nanoindentation hardnesses of the 4nm-period (C/BN)n multilayered film are the highest of all (C/BN)n films. Multilayered film of a suitable period has superior hardness and nanoscratching resistance. From the nanoscratching test evaluation, oscillatory scratching test, and ball-on-disk tribo test, the friction of the 4nm-period (C/BN)n multilayered film is lower than those of other (G/BN)n, carbon, boron nitride and carbon nitride films. The 4nm-period (C/BN)n multilayered films show the least damage and superior sliding endurance.

収録刊行物

• 日本機械学会論文集Ｃ編

  日本機械学会論文集Ｃ編 68 (668), 1291-1296, 2002

  一般社団法人 日本機械学会

キーワード

• Solid Lubrication
• Superlattice Films
• Hardness
• Tribology
• Wear
• Friction

詳細情報

• CRID: 1390001206356514176
• NII論文ID: 130004234301
• NII論文ID: 110002378476
• NII書誌ID: AN00187463
• DOI: 10.1299/kikaic.68.1291
• COI: 1:CAS:528:DC%2BD38XltVKnu7c%3D
• ISSN: 18848354
• ISSN: 03875024
• NDL書誌ID: 6148366
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I6148366
• Web Site: http://www.jstage.jst.go.jp/article/kikaic1979/68/668/68_668_1291/_pdf
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可