3点法による真円度測定における高次成分算出の試行  [in Japanese] High-Order Calculation by 3-Point Method for Precise Roundness Measurement  [in Japanese]

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Author(s)

Abstract

In the field of roundness measurements, the 3-point method is very useful. We used this method for precise column estimation in the range of 0.01 micron p-p including high-order harmonic components up to the 254th. The high-order calculation is critical for setting angles among three sensors. We determined the invalid setting angles and showed it on a chart, and we show a method for obtaining suitable accurate angles among these sensors. We are testing the relative accuracy on the testing model. Absolute accuracy has not been confirmed yet, but we consider that these results show me a reasonable roundness.

Journal

  • Transactions of the Japan Society of Mechanical Engineers. Series C.

    Transactions of the Japan Society of Mechanical Engineers. Series C. 00062(00604), 4596-4602, 1996-12-25

    The Japan Society of Mechanical Engineers

References:  19

Cited by:  1

Codes

  • NII Article ID (NAID)
    110002382441
  • NII NACSIS-CAT ID (NCID)
    AN00187463
  • Text Lang
    JPN
  • Article Type
    Journal Article
  • ISSN
    03875024
  • NDL Article ID
    4105982
  • NDL Source Classification
    ZN11(科学技術--機械工学・工業)
  • NDL Call No.
    Z16-1056
  • Data Source
    CJP  CJPref  NDL  NII-ELS 
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