3点法による真円度測定における高次成分算出の試行 High-Order Calculation by 3-Point Method for Precise Roundness Measurement

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抄録

In the field of roundness measurements, the 3-point method is very useful. We used this method for precise column estimation in the range of 0.01 micron p-p including high-order harmonic components up to the 254th. The high-order calculation is critical for setting angles among three sensors. We determined the invalid setting angles and showed it on a chart, and we show a method for obtaining suitable accurate angles among these sensors. We are testing the relative accuracy on the testing model. Absolute accuracy has not been confirmed yet, but we consider that these results show me a reasonable roundness.

収録刊行物

  • 日本機械学会論文集. C編

    日本機械学会論文集. C編 00062(00604), 4596-4602, 1996-12-25

    一般社団法人日本機械学会

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被引用文献:  1件中 1-1件 を表示

各種コード

  • NII論文ID(NAID)
    110002382441
  • NII書誌ID(NCID)
    AN00187463
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    03875024
  • NDL 記事登録ID
    4105982
  • NDL 雑誌分類
    ZN11(科学技術--機械工学・工業)
  • NDL 請求記号
    Z16-1056
  • データ提供元
    CJP書誌  CJP引用  NDL  NII-ELS 
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