磁気ヘッド接触計測用薄膜圧電ＡＥセンサの出力特性に関する検討

• 今井 郷充

• BURGER Gert Jan

• LAMMERINK Theo S. J.

• FLUITMAN Jan H. J.

書誌事項

タイトル別名

• Output Characteristics of a Thin-Film Piezoelectric AE Sensor for Magnetic Head-Disk Interaction.
• ジキ ヘッド セッショク ケイソクヨウ ハクマク アツデン AE センサ ノ

抄録

A new type of acoustic emission (AE) sensor was developed for detecting head-disk interaction in magnetic disk devices. In order to develop a small sensor, we used a thin-film piezoelectric material and mounted it on the Si slider using micromachining techniques. We conducted a basic experiment and a simulation of sensor output, and confirmed that the simulation used here can predict sensor output characteristics, This paper describes the structure of the sensor and the method of simulation. We also performed several other simulations of sensor output characteristics using this method, and confirmed that the new sensor is applicable to tribological research on head-disk interaction.

収録刊行物

• 日本機械学会論文集Ｃ編

  日本機械学会論文集Ｃ編 62 (595), 928-935, 1996

  一般社団法人 日本機械学会

キーワード

• Sensor
• Piezo-Element
• Impact
• Acoustic Emission
• Sensitivity Analysis
• Tribology
• Magnetic Disk
• Micromachine

詳細情報

• CRID: 1390001206327950848
• NII論文ID: 130004231598
• NII論文ID: 110002382533
• NII書誌ID: AN00187463
• DOI: 10.1299/kikaic.62.928
• ISSN: 18848354
• ISSN: 03875024
• NDL書誌ID: 3936113
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I3936113
• Web Site: http://www.jstage.jst.go.jp/article/kikaic1979/62/595/62_595_928/_pdf
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可