ピエゾアクチュエータを用いたスマート構造による精密生産施設のアクティブ微振動制振  [in Japanese] Active Microvibration Control of Precision Manufacturing Facilities with Smart Structure Using Piezoelectric Actuator  [in Japanese]

Search this Article

Author(s)

Abstract

A smart structure was tested for active microvibration control of a 2-story steel frame building model of a 5×3×4^Hm outer size and a 2 500 kg total weight which was excited by ambient ground vibration. In the structure, piezoelectric actuators attached to the columns and the beams were used for the microvibration control by bending moment control of them. The controller was designed using the H^ ∞ control theory. The tests showed that the smart structure could effectively reduce the three-dimensional microvibration of the building model, and its applicability to floors and even entire buildings of semiconductor manufacturing factories having steel frame structures.

Journal

  • Transactions of the Japan Society of Mechanical Engineers. Series C.

    Transactions of the Japan Society of Mechanical Engineers. Series C. 00066(00647), 2122-2127, 2000-07-25

    The Japan Society of Mechanical Engineers

References:  2

Cited by:  3

Codes

  • NII Article ID (NAID)
    110002383173
  • NII NACSIS-CAT ID (NCID)
    AN00187463
  • Text Lang
    JPN
  • Article Type
    Journal Article
  • ISSN
    03875024
  • NDL Article ID
    5416362
  • NDL Source Classification
    ZN11(科学技術--機械工学・工業)
  • NDL Call No.
    Z16-1056
  • Data Source
    CJP  CJPref  NDL  NII-ELS 
Page Top