スライダ搭載薄膜圧電ＡＥセンサの出力特性の実験的検討

• 今井 郷充

書誌事項

タイトル別名

• Output Characteristics of a Thin-Film Piezoelectric Acoustic Emission Sensor Array on a Si Slider.
• スライダ トウサイ ハクマク アツデン AE センサ ノ シュツリョク トクセイ ノ ジッケンテキ ケントウ

抄録

Output characteristics of a thin-film piezoelectric acoustic emission (AE) sensor array (sputtered ZnO, 0.1×0.1 mm) fabricated on a 2-mm-long Si slider for detecting head-disk interactions in hard disk drive systems were determined. The output characteristics were compared with those of a bulk AE sensor (0.7×0.7×1.0) attached to the back of the slider. Sensitivity of the thin-film sensor was about 1.7 mV/N, almost half of that of the bulk sensor. The thin-film sensor could detect AE waves caused by the contact force about 1.7 mm away from the sensor. When the slider contacted a bump on the disk, the output waveforms of the thin-film sensor were almost the same as those of the bulk sensor, and the noise level of the thin-film sensor was lower than that of the bulk sensor. Output signals of the array sensor matched the slider flying height at the position of each sensor.

収録刊行物

• 日本機械学会論文集Ｃ編

  日本機械学会論文集Ｃ編 63 (613), 3075-3081, 1997

  一般社団法人 日本機械学会

キーワード

• Sensor
• Piezo Element
• Acoustic Emission
• Tribology
• Magnetic Disk
• Micromachine

詳細情報

• CRID: 1390001206328356608
• NII論文ID: 110002385224
• NII論文ID: 130004232394
• NII書誌ID: AN00187463
• DOI: 10.1299/kikaic.63.3075
• ISSN: 18848354
• ISSN: 03875024
• NDL書誌ID: 4303782
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4303782
• Web Site: http://www.jstage.jst.go.jp/article/kikaic1979/63/613/63_613_3075/_pdf
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可