スクロール真空ポンプの研究

• 森下 悦生

• 菅波 拓也

• 西田 光博

• 木藤良 善久

• 山本 作衛

• 藤井 好三郎

書誌事項

タイトル別名

• Scroll vacuum pump.
• スクロール シンクウ ポンプ ノ ケンキュウ

抄録

Scroll machines have very good sealing characteristics, and the authors have attempted to develop a scroll vacuum pump. A rotating mechanism was employed instead of an orbiting mechanism from the point of view of load pattern and mechanical simplification. The axial and the radial sealing techniques were utilized. The radial sealing mechanism is particularly easy and effective due to the stationary seal line. A spiral with zero top clearance volume and a compact Oldham coupling were the other key technologies. Vacuums of 1 Pa (10^-2 Torr) for dry operation, and of 10^-2 Pa (10^-4 Torr) for oil flooded operation were achieved at 1 800 rpm.

収録刊行物

• 日本機械学会論文集Ｂ編

  日本機械学会論文集Ｂ編 54 (498), 410-413, 1988

  一般社団法人 日本機械学会

キーワード

• Seal

詳細情報

• CRID: 1390282681239134720
• NII論文ID: 130004218461
• NII論文ID: 110002401210
• NII書誌ID: AN00187441
• DOI: 10.1299/kikaib.54.410
• ISSN: 18848346
• ISSN: 03875016
• NDL書誌ID: 3166807
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I3166807
• Web Site: http://www.jstage.jst.go.jp/article/kikaib1979/54/498/54_498_410/_pdf
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可