第 1 部 (11) 形状記憶合金薄膜のマイクロアクチュエーターへの応用 Ni-Ti Shape Memory Alloy Thin Films for Microactuator Application
Ni-Ti shape memory alloy thin films are attractive for applications in microactuators due to their large forces and displacements. The films can be thermally actuated and possess fast cooling properties because of their large surface area-to-volume ratio. In this paper, we report the sputter-deposition of Ni-Ti shape memory alloy and the fabrication processes including method of heat treatment for shape memorizing process of Ti-Ni thin films for applications in microactuators. In addition, the effect of heating condition on the response characteristics of Ti-Ni thin films, such as amplitude of response waveform, response frequency and recovery force, is also discussed.
材料力学部門春のシンポジウム講演論文集 2003, 60-63, 2003