Ni-Ti Shape Memory Alloy Thin Films for Microactuator Application

• TAKAGI,Hitoshi

  The University of Tokushima

Bibliographic Information

Other Title

• 第 1 部 (11) 形状記憶合金薄膜のマイクロアクチュエーターへの応用

Abstract

Ni-Ti shape memory alloy thin films are attractive for applications in microactuators due to their large forces and displacements. The films can be thermally actuated and possess fast cooling properties because of their large surface area-to-volume ratio. In this paper, we report the sputter-deposition of Ni-Ti shape memory alloy and the fabrication processes including method of heat treatment for shape memorizing process of Ti-Ni thin films for applications in microactuators. In addition, the effect of heating condition on the response characteristics of Ti-Ni thin films, such as amplitude of response waveform, response frequency and recovery force, is also discussed.

Journal

• 材料力学部門春のシンポジウム講演論文集

  材料力学部門春のシンポジウム講演論文集 2003 60-63, 2003-03-27

  日本機械学会

Keywords

• Shape Memory Alloy
• Thin film
• Ni-Ti
• Microactuator
• Sputtering

Details

• CRID: 1541417145230402432
• NII Article ID: 110002477741
• NII Book ID: AA11903084
• Web Site: http://dl.ndl.go.jp/info:ndljp/pid/10351221
• Text Lang: ja
• Data Source:
  • NDL-Digital
  • CiNii Articles