322 リニーク干渉計に基づくナノ CMM レーザトラッピングプローブの位置検出特性

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  • Positional Detection Characteristics of Nano-CMM Laser Trapping Probe Based on Linnik Interferometer

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We have been developing the new probe technique for the nano-CMM, that is called the laser trapping probe whose principle is based on single-beam gradient-force optical trapping techniques and microscope interferometers. The work reported in this paper deals with fundamental characteristics on the practical positional detection and measurements of a glass microsphere with National Institute of Standards and Technology (NIST) traceable mean diameter of 168±8.4μm using the laser trapping probe based on Linnik interferometer. Positional detection is based on displacement of a microprobe sphere caused by external forces at the position where it approximates to a workpiece. Linnik interferometer performs sensing this displacement with high accuracy. Measurement results of the glass micro-sphere demonstrate a potentiality of the laser trapping probe as a positional detection probe for the nano-CMM.

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