122 微小変位特性のナノ位置決めへの応用 [in Japanese] Application of Micro-Displacement Characteristics to Nanoscale positioning [in Japanese]
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Recently, the nanoscale positioning of table is frequently required for industrial applications. There have been developed many methods of positioning together with that utilizing the friction property. In this study, using the friction property and the micro-displacement which arises when two surfaces pressed together are subjected to a tangential force, a basic idea is proposed for developing the positioning system.
日本機械学会関東支部ブロック合同講演会講演論文集 2002, 159-160, 2002