2918 シュリンクフィッタ使った大口径走査レンズによるレーザ加工装置の開発

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  • Development of the laser processing system with a large scanning lens fixed by a shrink fitter

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Laser beam machining has mainly been applied to the rough processing like the cutting of the metal sheet. At present, the application is also examined to minute parts such as electronic equipment and communication equipment, and the development of the minute and high-precise processing technology by the laser processing has been challenged. However, the technology of the laser processing which can process the wide area at high speed has not yet been established. In this study, such high-speed, wide and high-precise laser beam processing system was developed by using the large fθ lens system assembled by the shrink fitter and the galvano motors which can be scanned in the biaxial directions.

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