Measurement of Spreading Characteristics of Molecularly Thin Lubricant Film over Surfaces with Groove-Shaped Textures Based on Diffraction Simulation

Bibliographic Information

Other Title
  • 3201 回折シミュレーションに基づく溝状テクスチャ付き表面における分子層潤滑膜の表面流動特性の測定

Abstract

A method which enables measurement of thickness of a molecularly thin lubricant film coated on a surface with groove-shaped textures is presented. In this method, zero-order diffracted light is first calculated versus the film thickness by using rigorous coupled-wave analysis, and then parameters measured by an ellipsometer are converted to film thickness by using the calculated result. Lubricant spreading is experimentally measured on a grooved surface with this method. Compared with that on a smooth surface, lubricant spreading is faster on the grooved surface, indicating an acceleration effect of the grooves.

Journal

Details 詳細情報について

Report a problem

Back to top