マイクロ振動子における微小エネルギーフローの研究 A Micro-Energy Flow of a Microcantilever
From the viewpoint of a micro energy flow, the microsystems design method is investigated for the microactuators and sensors. A simple microsystem is developed as our model, which is excited photothermally by the light from high power laser diode. The exciting point to vibrate a cantilever at maximum amplitude is obtained near the clamped position, which means the maximum efficiency of energy transmission. The energy dissipation characteristics of the cantilever is analytically evaluated. The quantities of dissipation caused by airflow force, internal friction and support loss are calculated and comparedith with experimental results. As a results, micro energy input position and the relationship between microbeam size and dissipation ratio are evaluated, which makes progress in a design method of the microsystems excited by a wireless energy supply.
日本時計学会誌 157(0), 15-21, 1996