マイクロメカニズムの運動におけるスティックスリップ Stick-Slip Motion of Micromechanisms
This paper studies on the stick-slip motion of micromechanisms which is one of the most important issues in their microdynamics design since it deteriorates the motion control accuracy of micromechanism applications such as optical fiber alignment and magnetic head positioning. First, stick-slip motion of micromechanisms is observed clearly in micro wire insertion motion and brush actuator driving mechanism motion. Next, on the basis of our another reserch of cantilever dynamics, approximate formula that predicts critical condition for the stick-slip of a cantilever is derived in the cantilever of small damping.ζ<<1. The experimental apparatus is consisted of a cantilever, a laser displacement sensor and an extremely slow turn table with a linear velocity between 0.005 and 0.5 mm/s. The experimental results of vibration frequency and critical velocity agreed well with theoretical results. Moreover, the relationship between the cantilever size and the critical velocity is studied based on our theory. It is predicted that there exits a cantilever size which minimizes stick-slip appearance region.
日本時計学会誌 160(0), 1-10, 1997