Ultraprecision Surface Profile Measurement by Laser

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  • レーザによる超精密形状測定
  • レーザー ニ ヨル チョウ セイミツ ケイジョウ ソクテイ

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Abstract

An ultraprecision surface profile measuring instrument for measuring surface roughness, microangle, profile or the like has been put to practical use as an on-line measuring instrument for a production line.This instrument is based on the principle of optical-heterodyne interferometry using a laser and an acousto-optic device. The resolutions of surface. roughness and microangle are on the order of 0.001μm and 0.001°, respectively. This instrument is scarcely affectcld by the influences of vibration and reflection factor of the sample surface. Therefore, stable measurements can be made, and surf ace profiles can be obtained by an easy data processing method.

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