Studies of Cosputtered NdFeB Thin Films

• Piramanayagam S. N.

  Department of Information Engineering, Shinshu University

• Matsumoto M.

  Department of Information Engineering, Shinshu University

• Morisako A.

  Department of Information Engineering, Shinshu University

• Takei S.

  Department of Information Engineering, Shinshu University

抄録

A detailed study on the effect of composition and other process parameters on the magnetic properties of NdFeB thin films is presented. It was found that a neodymium concentration of 13-16 at% and a substrate temperature of 560°C were suitable for forming the Nd₂Fe₁₄B phase. An investigation into the effect of the substrate revealed that substrates that have oxygen content may not be suitable for preparing these thin films. The coercive force of these films was also found to depend on the thickness.

収録刊行物

• 日本応用磁気学会誌

  日本応用磁気学会誌 21 (4_2), 417-420, 1997

  公益社団法人 日本磁気学会

キーワード

• hard magnetic thin films
• high coercivity
• co-sputtering
• effect of substrates
• annealing

詳細情報

• CRID: 1390001205093923456
• NII論文ID: 110002809899
• NII書誌ID: AN0031390X
• DOI: 10.3379/jmsjmag.21.417
• ISSN: 18804004
• ISSN: 02850192
• NDL書誌ID: 4192951
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4192951
• Web Site: http://dl.ndl.go.jp/info:ndljp/pid/10463461
• 本文言語コード: en
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • NDL-Digital
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可