Co-Kβ X 線反射率法によるスピンバルブ膜層構造解析の基礎検討
書誌事項
- タイトル別名
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- Layered Structure Analysis of Multilayers by X-Ray Reflectometry Using a Co-Kβ Line
- Co-Kベータ Xセン ハンシャ リツホウ ニヨル スピン バルブ マク ソウ
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The X-ray reflectivity method using a Co-Kβ line was used to analyze the layered structure of multilayers consisting of Co, Cu, CoFe, and NiFe layers. The thickness and interface width values of each layer can be obtained more accurately than in the conventional method using a Cu-Kαline, because of the anomalous dispersion effect, which enhances the X-rays reflected from the interfaces of the Co and CoFe layers. The value of δ for each layer at the Co-Kβ X-ray wavelengh was obtained from the refractive index 1-δ by analysis of the reflectivities. The δ values of Co, Cu, and NiFe were within 2% of the value calculated fom the bulk density. Careful analysis of the Co / Cu / CoFe / NiFe multilayers by the least-squares method showed that the layer thickness of 1 nm can be refined.
収録刊行物
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- 日本応用磁気学会誌
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日本応用磁気学会誌 22 (4_1), 190-193, 1998
公益社団法人 日本磁気学会
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詳細情報 詳細情報について
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- CRID
- 1390001205092631040
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- NII論文ID
- 110002810103
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- NII書誌ID
- AN0031390X
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- ISSN
- 18804004
- 02850192
- http://id.crossref.org/issn/02850192
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- NDL書誌ID
- 4435094
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- データソース種別
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- JaLC
- NDL
- Crossref
- NDL-Digital
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可