粒子線検出用二次元固体撮像素子(<特集>質量分析法の応用技術)

• 杁本 尚義

  東京工業大学理学部

• 松本 一哉

  オリンパス光学工業(株)応用研究部

書誌事項

タイトル別名

• Solid-state imager for charged particles.
• 粒子線検出用二次元固体撮像素子
• リュウシセン ケンシュツヨウ 2ジゲン コタイ サツゾウ ソシ

抄録

Charged particles such as ions and electrons with keV order kinetic energy are important as probes and signals for surface analyses. Many detection systems have been developed to measure two-dimensional distribution of particles. However, the capabilities of solid-state area detector are not sufficient for quantitative analysis of the charged particles; although the solid-state imager such as the charge coupled device has been successfully developed to detect photons in optical spectroscopy. This paper discusses the performance and characteristics of a novel solid-state imager for charged particles, which is useful for charged particle detection in such procedures as mass spectrometry and electron microscopy.

収録刊行物

• 分析化学

  分析化学 45 (6), 493-500, 1996

  公益社団法人 日本分析化学会

キーワード

• solid-state imager
• charged particle
• ion
• electron
• detector

詳細情報

• CRID: 1390001204053682944
• NII論文ID: 110002907043
• NII書誌ID: AN00222633
• DOI: 10.2116/bunsekikagaku.45.493
• NDL書誌ID: 3966868
• ISSN: 05251931
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I3966868
• Web Site: http://www.jstage.jst.go.jp/article/bunsekikagaku1952/45/6/45_6_493/_pdf
• Web Site: http://dl.ndl.go.jp/info:ndljp/pid/10893834
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • NDL-Digital
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可