二次イオン質量分析法による鉄-20クロム-5アルミニウム合金の高温酸化皮膜の分析(<特集>質量分析法の応用技術)

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タイトル別名
  • SIMS analysis of oxide films formed on Fe-20Cr-5Al alloys.
  • 二次イオン質量分析法による鉄－２０クロム－５アルミニウム合金の高温酸化皮膜の分析
  • 2ジ イオン シツリョウ ブンセキホウ ニヨル テツ 20 クロム 5 アルミ

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抄録

A charge neutralization method in SIMS was successfully applied to the analysis of La, Fe and Cr in Al2O3 films formed on Fe-20Cr-5Al alloy. The method consists of the preevaporation of Al or Au on the surface of the specimen except for the masked region and simultaneous irradiation of electrons. The surface charge was compensated for by the electron irradiation. The pre-evaporated film served as the surface charge path. Elemental depth profiles of the oxide films on annealed and as-rolled Fe-20Cr-5Al alloys showed that Fe and Cr were enriched in the surface region, the Fe concentration in the former being lower than that in the latter. La and Al were also enriched in the surface region on annealed specimens before oxidation. These results suggest that the diffusion of O during high temperature oxidation is retarded by the surface oxide film on annealed specimens, and consequently resistance to high temperature oxidation was improved.

収録刊行物

  • 分析化学

    分析化学 45 (6), 625-634, 1996

    公益社団法人 日本分析化学会

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